A Gas Sensor Design and Heat Transfer Simulation with ZnO and TiO2 Sensing Layers

Micro Electro-Mechanical System (MEMS) based devices offer innovative approaches in sensor technologies with the advantages of high efficiency and miniaturization. The most important stage development new generation MEMS-based is design optimization stage. However, device processes are developed a laboratory by empirical approaches. This causes time loss creates an unnecessary waste resources. In this study, it aimed to analyze two gas sensors on ZnO TiO2 sensing layers. Electro-thermal analysis structure was carried out at room temperature (294,15K-573,15K) heat transfer parameters were compared. According simulation results, obtained that, as applied increases sensor, over layer linearly. It compatible literature. surface three times temperature. results will be used guide for future works. way, result numerical analysis, produced accuracy. Thus, resources saved.